Nozzle cleaning device and nozzle drying method

ABSTRACT

A nozzle cleaning device for cleaning suction nozzle  62 , wherein the jetting direction of water jetted towards the tip section of the suction nozzle is changed by a tapered second internal surface  374  of socket  370 . Accordingly, for example, not only is it possible to appropriately remove items adhering to the lower surface of the tip of the suction nozzle, it is possible to remove items adhering to the side surfaces of the tip of the suction nozzle by applying water. The suction nozzle is cleaned while being supported by nozzle pallet  152 ; after the suction nozzle is cleaned, the suction nozzle is held by a holding tool and removed from the nozzle pallet. Accordingly, the suction nozzle removed from the nozzle pallet is individually dried by the nozzle drying device. Thus, it is possible to appropriately dry the suction nozzle after cleaning.

TECHNICAL FIELD

The present application relates to a nozzle cleaning device that cleanssuction nozzles using water jetted from a water jetting apparatus, and anozzle drying method for drying nozzles cleaned by the nozzle cleaningdevice.

BACKGROUND ART

Suction nozzles used for performing mounting work of mounting electroniccomponents on circuit boards require regular cleaning because there arecases in which viscous fluid such as solder gets on the suction nozzleduring mounting work. Because it is desired to remove this viscous fluidadhering to suction nozzles, as disclosed in patent literature 1 to 4below, the development of nozzle cleaning devices for cleaning suctionnozzles is progressing. Also, before using cleaned suction nozzles formounting work again, it is necessary to remove any water that remainsfrom the cleaning process. For this reason, technology has beendeveloped for drying nozzles, as disclosed in patent literature 3 and 4below.

Patent Literature 1: JP-A-2007-123559

Patent Literature 2: JP-A-2006-026609

Patent Literature 3: JP-A-2000-012667

Patent Literature 1: JP-A-2005-101524

SUMMARY

According to the technology disclosed in the above patent literature, toa certain extent it is possible to remove items adhering to a suctionnozzle such as viscous fluid, and to dry the suction nozzle aftercleaning. However, it is difficult to appropriately remove itemsadhering to a suction nozzle by simply jetting water or the like ontothe suction nozzle. Also, when cleaning a suction nozzle, there arecases in which, with the suction nozzle loaded on a nozzle support toolor the like, the suction nozzle is cleaned together with the nozzlesupport tool; in this case, water gets between the nozzle support tooland the suction nozzle, such that it is difficult to appropriately drythe suction nozzle. The present disclosure takes account of suchproblems and an object thereof is to appropriately remove adhering itemsfrom a suction nozzle and appropriately dry the cleaned suction nozzle.

To solve the above problems, a nozzle cleaning device disclosed in thisapplication includes: a nozzle support tool that fixedly supports asuction nozzle in a cleaning box such that a tip of the suction nozzleis exposed; a water jetting apparatus that jets water at the tip of thesuction nozzle supported by the nozzle support tool so as to clean thesuction nozzle, and a jetting direction changing mechanism that changesthe jetting direction of the water jetted from the water jettingapparatus.

Also, to solve the above problems, a drying method disclosed in thisapplication includes: a step of cleaning the suction nozzle supported bythe nozzle support nozzle using the nozzle cleaning device, followed by,a drying step of drying the suction nozzle, the drying step including aholding step of holding the suction nozzle supported by the nozzlesupport tool using a holding tool, a moving step of moving the suctionnozzle held by the holding tool to a nozzle drying device using a movingdevice, and a first drying step of drying the suction nozzle held by theholding device using the nozzle drying device.

According to disclosed the nozzle cleaning device, it is possible tochange the jetting direction of water jetted towards the tip of thesuction nozzle. Accordingly, for example, not only is it possible toappropriately remove items adhering to the lower surface of the tip ofthe suction nozzle, it is possible to remove items adhering to the sidesurfaces of the tip of the suction nozzle by applying water. Also,according to the disclosed drying method, the suction nozzle supportedby the support tool is held by the holding tool and thus removed fromthe nozzle support tool. Accordingly, the suction nozzle removed fromthe nozzle support tool is individually dried by the nozzle dryingdevice. Thus, it is possible to appropriately dry the suction nozzleafter cleaning.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view of an electronic component mounter.

FIG. 2 is a perspective view of a mounting head provided on theelectronic component mounter.

FIG. 3 is perspective view of a suction nozzle.

FIG. 4 is a plan view of a nozzle tray in a partially exposed state.

FIG. 5 is a plan view of a nozzle tray in a fully exposed state.

FIG. 6 is a side view of the nozzle tray of FIG. 4.

FIG. 7 is a cross section showing the nozzle tray storing a suctionnozzle.

FIG. 8 is a perspective view showing a nozzle management device.

FIG. 9 is a perspective view from the front right showing the internalconfiguration of the nozzle management device.

FIG. 10 is a perspective view from the front left showing the internalconfiguration of the nozzle management device.

FIG. 11 is a plan view of a nozzle pallet in a partially exposed state.

FIG. 12 is a plan view of a nozzle pallet in a fully exposed state.

FIG. 13 is a cross section showing a nozzle pallet storing a largesuction nozzle.

FIG. 14 is a cross section showing a nozzle pallet storing a smallsuction nozzle.

FIG. 15 is a perspective view showing a nozzle transfer device providedin the nozzle management device.

FIG. 16 is a cross section showing a discard box.

FIG. 17 is a cross section showing a blow device.

FIG. 18 is a perspective view showing a first nozzle inspection deviceprovided in the nozzle management device.

FIG. 19 is a perspective view showing a second nozzle inspection deviceprovided in the nozzle management device.

FIG. 20 is a perspective view showing a nozzle cleaning device providedin the nozzle management device.

FIG. 21 is a perspective view showing the nozzle cleaning device withhousing removed.

FIG. 22 schematically shows the nozzle cleaning device.

FIG. 23 shows the change over time of the load when the suction tube ofa nozzle with an internal spring retreats inside the body pipe of thenozzle.

FIG. 24 shows the change over time of the load when the suction tube ofa nozzle without a spring retreats inside the body pipe of the nozzle.

FIG. 25 is an enlarged view of the tip of the suction tube of thesuction nozzle when the suction nozzle is being cleaned by aconventional nozzle cleaning device.

FIG. 26 is a cross section showing a nozzle pallet with a socketattached.

FIG. 27 is an enlarged view of the tip of the suction tube of thesuction nozzle when the suction nozzle is being cleaned by the nozzlecleaning device of the present disclosure.

FIG. 28 is a view from below the socket of the location at which highpressure water is applied when the suction nozzle is cleaned using thesocket.

FIG. 29 is a view from below the socket of the location at which highpressure water is applied when the suction nozzle is cleaned using thesocket.

FIG. 30 is a view from below the socket of the location at which highpressure water is applied when the suction nozzle is cleaned using thesocket.

FIG. 31 is a view from below the socket of the location at which highpressure water is applied when the suction nozzle is cleaned using thesocket.

DESCRIPTION OF PREFERRED EMBODIMENTS

The following describes in detail referring to the figures an exampleembodiment of the present disclosure.

Configuration of Electronic Component Mounting Device

An electronic component mounting device (hereinafter in some casesabbreviated to “mounting device”) 10 is shown in FIG. 1. Mounting device10 includes one system base 12, and two electronic component mounters(hereinafter in some cases abbreviated to “mounter”) 14 providedadjacently to each other on the system base 12. Note that, the directionin which the mounters 14 are lined up is referred to as the X-axisdirection, and the horizontal direction which is perpendicular to theX-axis direction is referred to as the Y-axis direction.

Each mounter 14 is provided mainly with mounter body 20, conveyancedevice 22, mounting head moving device (hereinafter in some casesabbreviated to “moving device”) 24, mounting head 26, supply device 28,and nozzle station 30. Mounter body 20 is configured from frame 32 andbeam 34 that is mounted on the frame 32.

Conveyance device 22 is provided with two conveyor devices 40 and 42.The two conveyor devices 40 and 42 are parallel to each other and areprovided on frame 32 extending in the X-axis direction. Each of the twoconveyor devices 40 and 42 conveys a circuit board held on therespective conveyor devices 40 and 42 in the X-axis direction using anelectromagnetic motor (not shown). Also, the circuit board is fixedlyheld at a predetermined position by a board holding device (not shown).

Moving device 24 is an XY robot type moving device. Moving device 24 isprovided with an electromagnetic motor (not shown) that slides a slider50 in the X-axis direction, and an electromagnetic motor (not shown)that slides slider 50 in the Y-axis direction. Mounting head 26 isattached to slider 50, and the mounting head 26 is moved to any positionon frame 32 by the operation of the two electromagnetic motors 52 and54.

Mounting head 26 mounts electronic components on a circuit board. Asshown in FIG. 2, mounting head 26 includes multiple rod-shaped mountingunits 60; a suction nozzle 62 is attached to the lower end of each ofthe multiple mounting units 60. As shown in FIG. 3, suction nozzle 62 isconfigured from body pipe 64, flange 66, suction tube 68, and lockingpin 70. Body pipe 64 is cylindrical and flange 66 is fixed to the outersurface of body pipe 64 so as to project outwards. Suction tube 68 is athin pipe that is held on body pipe 64 movable in an axis line directionin a state extending downwards from the lower end of body pipe 64. Notethat, among suction nozzles 62 there are those in which elastic force isapplied to suction tube 68 and those in which elastic force is notapplied to suction tube 68.

In detail, in a suction nozzle 62 in which elastic force is applied tosuction tube 68, a spring (not shown) in a compressed state is providedbetween suction tube 68 and body pipe 64; and suction tube 68 is biasedin a direction extending downwards from the lower end of body pipe 64 bythe elastic force of the spring. In other words, by applying a force tothe tip of suction tube 68 against the elastic force of the spring,suction tube 68 retreats inside body pipe 64. In contrast, in a suctionnozzle 62 in which elastic force is not applied to suction tube 68, aspring is not provided between suction tube 68 and body pipe 64.However, in a suction nozzle 62 not provided with a spring betweensuction tube 68 and body pipe 64, a spring (not shown) is mounted on thetip section of an internally provided mounting unit 60. The internalspring of mounting unit 60 applies elastic force to suction tube 68 ofsuction nozzle 62 mounted on mounting unit 60. By this, the suction tube68 is biased so as extend down from the lower end of body pipe 64 by theelastic force of the spring of mounting unit 60. That is, even for asuction nozzle 62 not provided with a spring between suction tube 68 andbody pipe 64, by mounting suction nozzle 62 on mounting unit 60 providedwith an internal spring, when applying a force to the tip of suctiontube 68 against the elastic force of the spring, suction tube 68retreats inside body pipe 64.

Also, locking pin 70 of suction nozzle 62 is provided on an uppersection of body pipe 64 such that locking pin 70 extends in the diameterdirection of body pipe 64. Suction nozzle 62 is attached to the lowerend of mounting unit 60 using locking pin 70 such that suction nozzle 62is attachable/detachable with one touch. The method of attachment ofsuction nozzle 62 to mounting unit 60 using locking pin 70 is wellknown, so descriptions are omitted. Also, a cutout 72 is formed in theouter edge of flange 66 and 2D code 74 is provided on the upper surfaceof flange 66.

Suction tube 68 of suction nozzle 62 is connected to a positive/negativepressure supply device (not shown) via a negative pressure air andpositive pressure air passage. Thus, the tip of suction tube 68 ofsuction nozzle 62 picks up and holds an electronic component usingnegative pressure, and releases the held electronic component usingpositive pressure. As shown in FIG. 2, rod-shaped mounting units 60 areheld on the outer surface of unit holding body 76 at a pitch of equalangles such that the axis direction of the mounting units 60 isvertical. And, each suction nozzle 62 extends downwards from the bottomsurface of unit holding body 76.

Also, unit holding body 76 is intermittently rotated by equal angleincrements at the arrangement angle pitch of mounting units 60 byholding body rotating device 78. Thus, the multiple mounting units 60are stopped successively at a raising/lowering station which is one ofthe stopping positions of the mounting units 60. A mounting unit 60 thathas stopped at the raising/lowering station is raised/lowered by unitraising/lowering device 80. Also, a mounting unit 60 that has stopped atthe raising/lowering station is rotated about its own axis by unitrotating device 82.

Supply device 28 is a feeder type supply device and, as shown in FIG. 1,is provided on the front end of frame 32. Supply device 28 has tapefeeders 86. Tape feeder 86 houses taped components in a wound state.Taped components are electronic components that have been put into tape.And, tape feeder 86 feeds taped components using a feeding device (notshown). Accordingly, feeder type supply device 28 supplies an electroniccomponent to a supply position through the feeding delivery of the tapedcomponents.

Nozzle station 30 is for storing multiple suction nozzles 62 and hasnozzle tray 88. As shown in FIG. 4, nozzle tray 88 has base plate 90 andcover plate 92; cover plate 92 is slidably provided on base plate 90.Note that, base plate 90 and cover plate 92 have roughly the samedimensions, and when cover plate 92 is slid with respect to base plate90, 2D code 94 provided at an end of base plate 90 is exposed.Conversely, as shown in FIG. 5, when cover plate 92 entirely overlapsbase plate 90, 2D code 94 is covered by cover plate 92.

As shown in FIG. 4 and FIG. 6 that is a cross-section of nozzle tray 88,multiple loading holes 96 are formed in base plate 90. Loading hole 96is a stepped through-hole into which a suction nozzle 62 can be loaded.In detail, the internal diameter of stepped surface 98 of steppedthrough-hole 96 is slightly larger than the outer diameter of flange 66of suction nozzle 62, and as shown in FIG. 7, flange 66 of suctionnozzle 62 is loaded on the stepped surface 98. Also, pin (refer to FIG.5) 100 is provided on stepped surface 98 and cutout 72 of flange 66engages with the pin 100. Thus, suction nozzle 62 loaded in loading hole96 is prohibited from being rotated around its own axis. Note that, forloading holes 96, there are loading holes 96 a with a small diameter andloading holes 96 b with a large diameter; a small suction nozzle 62 isloaded in a loading hole 96 a with a small diameter, and a large suctionnozzle 62 is loaded in a loading hole 96 b with a large diameter.

Also, holes 102 are formed in cover plate 92 to correspond to themultiple loading holes 96 of base plate 90. Hole 102 is configured fromcircular hole section 104 and slot section 106. Circular hole section104 is circular with an internal diameter slightly larger than steppedsurface 98 of the corresponding loading hole 96. Also, slot section 106is a portion which forms a cutout in the edge of circular hole section104, and is a cutout section that is slightly larger than the outerdiameter of body pipe 64 of suction nozzle 62.

With nozzle tray 88 with the configuration given above, by sliding coverplate 92 with respect to base plate 90, it is possible to switch betweena state in which, as shown in FIG. 4, loading hole 96 is partiallyexposed via hole 102 (hereinafter referred to as “partially exposedstate”), and a state in which, as shown in FIG. 5, hole 96 is entirelyexposed via hole 102 (hereinafter referred to as “entirely exposedstate”).

In detail, in the entirely exposed state, as shown in FIG. 5, the centerof loading hole 96 and the center of circular hole section 104 of hole102 are aligned such that stepped surface 98 of loading hole 96 is fullyexposed. Thus, in the entirely exposed state, it is possible to load asuction nozzle 62 in loading hole 96, and to remove a suction nozzle 62from loading hole 96. In other words, in the entirely exposed state, itis possible to house suction nozzles 62 in nozzle tray 88, and to removesuction nozzles 62 from nozzle tray 88.

Conversely, in the partially exposed state, as shown in FIG. 4, thecenter of loading hole 96 and the center of circular hole section 104 ofhole 102 are not aligned, such that a portion of stepped surface 98 ofloading hole 96 is covered by cover plate 92. Thus, in the partiallyexposed state, it is not possible to load a suction nozzle 62 in loadinghole 96, or to remove a suction nozzle 62 from loading hole 96. In otherwords, in the partially exposed state, it is not possible to housesuction nozzles 62 in nozzle tray 88, or to remove suction nozzles 62from nozzle tray 88. However, in the partially exposed state, the centerof loading hole 96 and the center of slot section 106 of hole 102 arealigned, and as shown in FIG. 7, body pipe 64 of suction nozzle 62loaded in loading hole 96 extends above cover plate 92 from slot section106.

Also, cover plate 92 can be slid with respect to base plate 90 betweenthe entirely exposed state and the partially exposed state, and isbiased in the direction of the partially exposed state by a spring (notshown). In other words, usually, the housing of suction nozzles 62 intonozzle tray 88 and the removal of suction nozzles 62 from nozzle tray 88is prohibited. However, nozzle station 30 has a plate moving mechanism(not shown) that slides cover plate 92 against the elastic force of thespring in the direction leading to the entirely exposed state, and bycover plate 92 being slid by the operation of the plate movingmechanism, the housing of suction nozzles 62 into nozzle tray 88, andthe removal of suction nozzles 62 from nozzle tray 88, are allowed. Notethat, nozzle tray 88 is attachable/detachable to/from nozzle station 30such that the collection of suction nozzles 62 housed in nozzle station30, or the replenishment of suction nozzles 62 to nozzle station 30, andthe like, can be performed outside mounter 14.

Mounting Work by a Mounter

It is possible to perform mounting work with respect to a circuit boardheld in conveyance device 22 using mounting head 26 in mounter 14 withthe above configuration. Specifically, based on commands of a controldevice (not shown) of mounter 14, a circuit board is conveyed to a workposition, and the circuit board is fixedly held at that position by aboard holding device. Also, based on commands of the control device,tape feeder 86 feeds taped components and supplies an electroniccomponent to a supply position. Then, mounting head 26 moves above thesupply position of the electronic component and picks up and holds theelectronic component using suction nozzle 62. Continuing, mounting head26 moves above the circuit board and mounts the held electroniccomponent on the circuit board.

Exchange of Suction Nozzles in a Nozzle Station

In mounter 14, as given above, an electronic component supplied by tapefeeder 86 is picked up and held by suction nozzle 62 and then mounted onthe circuit board. In mounter 14 configured in this way, suction nozzles62 are changed according to the size, type, and so on of the electroniccomponents. In other words, for example, when picking up and holding alarge electronic component, a suction nozzle 62 with a large diameter isused; when picking up and holding a small electronic component, asuction nozzle 62 with a small diameter is used. Thus, according to thetype of circuit board to be manufactured, it is required to use varioustypes of suction nozzles 62, such that various types of suction nozzles62 are housed in nozzle station 30 according to the type of circuitboard to be manufactured. Thus, exchange and so on is performed asnecessary between suction nozzles 62 attached to mounting units 60 ofmounting head 26 and suction nozzles 62 housed in nozzle station 30.Note that, methods of exchange and so on between suction nozzles 62attached to mounting units 60 of mounting head 26 and suction nozzles 62housed in nozzle station 30 are well known, so descriptions are omitted.

As given above, various types of suction nozzles 62 are housed in nozzlestation 30 according to the type of circuit board to be manufactured.Thus, for example, when the type of circuit board being manufactured ischanged, nozzle tray 88 is removed from nozzle station 30, and suctionnozzles 62 housed in nozzle tray 88 are exchanged using a nozzlemanagement device. The nozzle management device is described in detailbelow.

Configuration of Nozzle Management Device

Nozzle management device 110 is largely a rectangular cuboid and adrawer 118 for storing nozzle tray 88 inside nozzle management device110, and for removing nozzle tray 88 from nozzle management device 110,is provided on the front surface of nozzle management device 112. Panel120 for displaying various information, operation switches 122 forperforming inputting of information, and the like, are provided abovedrawer 118.

As shown in FIGS. 9 and 10, each nozzle management device 110 includespallet housing device 130, tray housing device 132, nozzle transferdevice 134, first nozzle inspection device 136, second nozzle inspectiondevice 138, and nozzle cleaning device 140. Note that, FIG. 9 is aperspective view showing the internal configuration of nozzle managementdevice 110 as seen from the front-right of nozzle management device 110;FIG. 10 is a perspective view showing the internal configuration ofnozzle management device 110 as seen from the front-left of nozzlemanagement device 110.

(a) Pallet Housing Device

Pallet housing device 130 is for housing nozzle pallets 152 shown inFIG. 11. In the same way as nozzle tray 88, nozzle pallet 152 has baseplate 154 and cover plate 156; cover plate 156 is slidably provided onbase plate 154. Note that, base plate 154 and cover plate 156 haveroughly the same dimensions, and when cover plate 156 is slid withrespect to base plate 154, 2D code 157 provided at an end of base plate154 is exposed. Conversely, as shown in FIG. 12, when cover plate 156entirely overlaps base plate 154, 2D code 157 is covered by cover plate156.

Also, reference nozzle 172 and reference pipe 174 are provided at acorner section of base plate 154. Reference nozzle 172 and referencepipe 174 penetrate base plate 154, and the lower end of reference nozzle172 and reference pipe 174 extend below base plate 154. Note that,cutout 176 is formed at a corner section of cover plate 156, such thatreference nozzle 172 and reference pipe 174 are exposed even in a statein which cover plate 156 entirely overlaps base plate 154.

Multiple loading holes 158 are formed in base plate 154, and as thesemultiple loading holes 158, there are loading holes 158 a with a smalldiameter and loading holes 158 b with a large diameter. Loading holes158 a with a small diameter are the same shape as loading holes 96 awith a small diameter of nozzle tray 88, and a suction nozzle 62 thatcan be loaded in a loading hole 96 a is loaded into a loading hole 158a. On the other hand, loading holes 158 b with a large diameter haveroughly the same shape as loading holes 96 b with a large diameter ofnozzle tray 88, but, as shown in FIG. 11 and FIG. 13 that is across-section of nozzle pallet 152, loading holes 158 b are steppedholes with two stepped surfaces 160 and 162. The internal diameter offirst stepped surface 160 is the same as the internal diameter ofloading hole 96 b with a large diameter of nozzle tray 88, and as shownin FIG. 13, a suction nozzle 62 that can be loaded in a loading hole 96b is loaded onto first stepped surface 160. The internal diameter ofsecond stepped surface 162 is smaller than the internal diameter offirst stepped surface 160, and as shown in FIG. 14, a suction nozzle 62that is smaller than a suction nozzle 62 which can be loaded onto firststepped surface 160 is loaded onto second stepped surface 162. Notethat, pin (refer to FIG. 12) 164 is provided on each of stepped surfaces160 and 162, and pin 164 engages with cutout 72 of flange 66 of suctionnozzle 62.

Also, holes 166 are formed in cover plate 156 to correspond to themultiple loading holes 158 of base plate 154. Hole 166 is the same shapeas hole 102 of nozzle tray 88 and is configured from circular holesection 168 and slot section 170. Thus, in the same way as with nozzletray 88, switching between a partially exposed state and an entirelyexposed state is possible with nozzle pallet 152.

In detail, in the entirely exposed state, as shown in FIG. 12, steppedsurface 160 and the like of loading hole 158 is fully exposed, and it ispossible to load a suction nozzle 62 in loading hole 158, and to removea suction nozzle 62 from loading hole 158. On the other hand, in thepartially exposed state, as shown in FIG. 11, a portion of steppedsurface 160 and the like of loading hole 158 is covered by cover plate156, and it is not possible to load a suction nozzle 62 in loading hole158, or to remove a suction nozzle 62 from loading hole 158. However, inthe partially exposed state, as shown in FIGS. 13 and 14, body pipe 64of suction nozzle 62 loaded in loading hole 158 extends above coverplate 156 from slot section 170.

Also, cover plate 156 can be slid with respect to base plate 154 betweenthe entirely exposed state and the partially exposed state, and isbiased in the direction of the partially exposed state by a spring (notshown). Thus, usually, the housing of suction nozzles 62 into nozzlepallet 152 and the removal of suction nozzles 62 from nozzle pallet 152is prohibited. However, in the same way as for nozzle tray 88, bysliding cover plate 156 against the elastic force of the spring in thedirection leading to the entirely exposed state, the housing of suctionnozzles 62 into nozzle pallet 152, and the removal of suction nozzles 62from nozzle pallet 152, are allowed.

Pallet housing device 130 is for housing nozzle pallets 152 with theabove configuration. As shown in FIGS. 9 and 10, pallet housing device130 has multiple pallet carriers 180 and a carrier circulating mechanism182. Pallet carrier 180 has the shape of a channel, that is, thecross-section of pallet carrier 180 forms a U-shape, and pallet carrier180 is provided such that the opening of the channel shape facesdownwards. Rails 183 are formed on internal surfaces of pallet carrier180, and a nozzle pallet 152 is held by the rails 183. Note that, anozzle pallet 152 is loaded on a pallet carrier 180 by being insertedfrom the front of the pallet carrier 180; a nozzle pallet 152 is removedfrom a pallet carrier 180 by being pulled forwards.

Carrier circulating mechanism 182 has a pair of sprocket axes 184; thepair of sprocket axes 184 are provided at the top and bottom extendingin a front/rear direction. Sprocket 186 is attached at each end of eachsprocket axis 184. The front sprockets 186 of the pair of sprocket axes184 are linked to each other by chain 188; the rear sprockets 186 of thepair of sprocket axes 184 are linked to each other by chain 190.

Multiple brackets 192 are attached to chains 188 and 190 and eachbracket 192 extends outwards perpendicularly from chain 188 or 190.Pallet carrier 180 is rotatably attached to an end of bracket 192attached to chain 188 and an end of bracket 192 attached to chain 190.Sprocket axes 184 are controllably rotated by the driving of anelectromagnetic motor (not shown). According to this kind ofconfiguration, multiple pallet carriers 180, that is, nozzle pallets 152held on pallet carriers 180, are circulated in an up/down directioninside nozzle management device 112 by carrier circulating mechanism182. Note that, during circulating, pallet carriers 180 are alwaysmaintained in a state in which the opening of the channel shape isfacing downwards, thus nozzle pallets 152 held in pallet carriers 180are circulated always in a horizontal state.

(b) Tray Housing Device

Tray housing device 132 is for housing nozzle trays 88 and is providedin front of pallet housing device 130. Tray housing device 132 hasmultiple tray carriers 200 and carrier circulating mechanism 202. Traycarrier 200, in the same way as pallet carrier 180, has the shape of achannel, and tray carrier 200 is provided such that the opening of thechannel shape faces downwards. Also, nozzle tray 88 is stored in traycarrier 200 by rails 204 formed on internal surfaces of tray carrier200. Note that, nozzle tray 88 is loaded on tray carrier 200 by beinginserted from the front of tray carrier 200; nozzle tray 88 is removedfrom tray carrier 200 by being pulled forwards.

Carrier circulating mechanism 202, in the same way as carriercirculating mechanism 182, has sprocket axes, sprockets, chains,brackets (symbols omitted), and the like, and operates in the same wayas carrier circulating mechanism 182. Thus, multiple tray carriers 200,that is, nozzle trays 88 held on tray carriers 200, are circulated in anup/down direction inside nozzle management device 110 by carriercirculating mechanism 202. Note that, during circulating, tray carriers200 are always maintained in a state in which the opening of the channelshape is facing downwards, thus nozzle trays 88 held in tray carriers200 are circulated always in a horizontal state.

(c) Nozzle Transfer Device

Nozzle transfer device 134 is for transferring suction nozzles 62between nozzle tray 88 and nozzle pallet 152, and as shown in FIG. 15,is provided on table 205 inside drawer 118. Nozzle transfer device 134has a transfer head 206 and a head moving device 207. Camera 208 facingdownwards and holding chuck (refer to FIGS. 9 and 10) 209 for holding asuction nozzle 62 are provided on a lower surface of transfer head 206.Also, head moving device 207 is an XYZ-type moving device that movestransfer head 206 forwards/backwards, left/right, and up/down abovetable 205. Further, head moving device 207 is equipped with a rotatingdevice (not shown) for rotating holding chuck 209 around its axis, suchthat suction nozzle 62 held by holding chuck 209 is able to be rotated.

Also, fixed stage 210 and movable stage 212 for setting nozzle tray 88are provided on table 205 inside drawer 118. Fixed stage 210 is fixed totable 205. On the other hand, movable stage 212 is slidbackwards/forwards by stage moving mechanism 214. Stage moving mechanism214 includes rails 216 provided on table 205 extending in a front/reardirection, and controllably slides movable stage 212 along rails 216.The rear end of rails 216 links with rails 204 of tray carrier 200circulated to a specified position by carrier circulating mechanism 202.Thus, by sliding movable stage 212, it is possible to house a nozzletray 88 set on movable stage 212 in tray carrier 200, and to set anozzle tray 88 housed in tray carrier 200 on movable stage 212.

Also, a plate moving mechanism (not shown) for moving cover plate 92 inthe direction leading to the entirely exposed state with respect to theset nozzle tray 88 is provided on fixed stage 210 and movable stage 212.Note that, in the diagram, a nozzle tray 88 is shown set on fixed stage210.

Also, first pallet moving mechanism 218 for moving nozzle pallet 152between a pallet carrier 180 circulated to a specified position bycarrier circulating mechanism 182 and a position at which transfer ofsuction nozzles by nozzle transfer device 134 is possible (hereinaftersometimes referred to as “nozzle transfer position”) is provided ontable 205 inside drawer 118. First pallet moving mechanism 218 includesrails 219 provided on table 205 extending in a front/rear direction, andcontrollably slides nozzle pallet 152 along rails 219. The rear end ofrails 219 links with rails 183 of pallet carrier 180 circulated to aspecified position by carrier circulating mechanism 182. Thus, it ispossible to move nozzle pallet 152 between a pallet carrier 180circulated to a specified position by carrier circulating mechanism 182and the nozzle transfer position. Note that, in the diagram, a nozzlepallet 152 is shown moved to the nozzle transfer position.

Transfer plate 220 is provided in front of nozzle pallet 152 moved tothe nozzle transfer position. Multiple loading holes 221 with the sameshape as loading holes 158 formed in base plate 154 of nozzle pallet 152are formed in transfer plate 220. In the same way as loading holes 158,as multiple loading holes 221, there are loading holes 221 with a largediameter and loading holes 221 with a small diameter such that suctionnozzles 62 of various sizes can be loaded.

Also, discard box 222 is provided on the front section of table 205inside drawer 118. Discard box 222 is divided into four spaces andsuction nozzles which have been determined to be abnormal, that isdefective nozzles, are divided and discarded into the four spaces. Notethat, as shown in FIG. 16, cushioning sheet 223 is arranged on thebottom surface of each discard box 222. Cushioning sheet 223 is formedfrom cushioning material and covers the entire surface of discard box222. Cushioning sheet 223 is configured from first inclined section 224,flat section 225, and second inclined section 226. As shown in FIG. 15,first inclined section 224 is positioned inside discard box 222 at thedrawer 118 end, and is an inclined surface that slopes down towards theoutside of drawer 118. Also, as shown in FIG. 16, second inclinedsection 226 is positioned at the end opposite to first inclined section224, and is a surface that slopes down towards first inclined section224. Further, flat section 225 is a flat surface that connects the lowerend of first inclined section 224 and the lower end of second inclinedsection 226.

As shown in FIG. 15, blow device 227 is arranged next to nozzle pallet152 moved to the nozzle transfer position. Blow device 227 is for dryingsuction nozzle 62, and as shown in FIG. 17, is configured from tubularmain body section 228, air ejection hole 229 formed in a side surface ofmain body section 228, and an air ejection device (not shown) connectedto air ejection hole 229.

(d) First Nozzle Inspection Device

First nozzle inspection device 136 is a device that performs inspectionof the tip of suction nozzle 62, that is inspection of the state ofsuction tube 68 (hereinafter sometimes referred to as “tip inspection”),and inspection of the force required for the tip of suction nozzle 62 toretreat, that is inspection of the force required for suction tube 68 toretreat into body pipe 64 (hereinafter sometimes referred to as “retreatforce inspection”), and is provided below nozzle transfer device 134.

As shown in FIG. 18, first nozzle inspection device 136 includesinspection unit 230 and unit moving device 232. Inspection unit 230includes base 234, camera device 236, and load measuring device 238.Camera device 236 is provided facing up on base 234. Load measuringdevice 238 includes load cell 240 and metal contact tool 242; load cell240 and metal contact tool 242 are provided in an exposed state on base234.

Unit moving device 232 includes fixed beam 250, movable beam 252, firstslider 254, and second slider 256. Fixed beam 250 is provided on theframe of nozzle management device 110 extending in a front/reardirection. Movable beam 252 is held on fixed beam 250 extending in aleft/right direction such that movable beam 252 can be slidforwards/backwards. Movable beam 252 is moved to any position in aforwards/backwards direction by the operation of first moving mechanism258. First slider 254 is held on movable beam 252 so as to be slidablein a left/right direction, and is moved to any position in a left/rightdirection by the operation of second moving mechanism 260. Second slider256 is held on first slider 254 so as to be slidable in an up/downdirection, and is moved to any position in an up/down direction by theoperation of third moving mechanism 262. Base 234 of inspection unit 230is fixed to the top of second slider 256. Thus, unit moving device 232functions as an XYZ-type moving device that moves inspection unit 230 toany position in up/down, left/right, and forwards/backwards directions.

Also, second pallet moving mechanism 266 is provided above first nozzleinspection device 136. Second pallet moving mechanism 266 is a mechanismfor moving nozzle pallet 152 between a pallet carrier 180 circulated toa specified position by carrier circulating mechanism 182, and aposition at which tip inspection and retreat force inspection can beperformed by first nozzle inspection device 136 (hereinafter sometimesreferred to as “first inspection position”). In detail, second palletmoving mechanism 266 includes rails 268 extending in a front/reardirection, and controllably slides nozzle pallet 152 along rails 268.The rear end of rails 268 links with rails 183 of pallet carrier 180circulated to a specified position by carrier circulating mechanism 182.Thus, it is possible to move nozzle pallet 152 between a pallet carrier180 circulated to a specified position by carrier circulating mechanism182 and the first inspection position. Note that, in the diagram, anozzle pallet 152 is shown moved to the first inspection position.

(e) Second Nozzle Inspection Device

Second nozzle inspection device 138 is a device that performs inspectionof the amount of air which flows inside suction nozzle 62 (hereinaftersometimes referred to as “air flow amount inspection”), and reading andinspection of 2D code 74 provided on flange 66 of suction nozzle 62(hereinafter sometimes referred to as “code reading inspection”), and isprovided below first nozzle inspection device 136.

As shown in FIG. 19, second nozzle inspection device 138 includesinspection head 270 and head moving device 272. Inspection head 270includes camera 274 and air supply device 276. Camera 274 is attached tothe lower end of inspection head 270 in a state facing down. Air supplydevice 276 includes air joint 278, air pressure sensor 280, and jointraising/lowering mechanism 282. Air joint 278 is connected to body pipe64 of suction nozzle 62 when performing air flow amount inspection, andsupplies air to suction nozzle 62 during air flow amount inspection viaair joint 278. Air pressure sensor 280 is provided on the upper end ofair joint 278 and measures the pressure of air supplied to suctionnozzle 62. Joint raising/lowering mechanism 282 raises/lowers air joint278 together with air pressure sensor 280.

Head moving device 272 includes movable beam 284 and slider 286. Movablebeam 284 is held on fixed beam 250 of the above first nozzle inspectiondevice 136 extending in a left/right direction and such that movablebeam 284 can be slid forwards/backwards. Movable beam 284 is moved toany position in a forwards/backwards direction by the operation of firstmoving mechanism 288. Slider 286 is held on movable beam 284 so as to beslidable in a left/right direction, and is moved to any position in aleft/right direction by the operation of second moving mechanism 290.Inspection head 270 is fixed to a side surface of slider 286. Thus, headmoving device 272 functions as an XY-type moving device that movesinspection head 270 to any position in forwards/backwards, andleft/right directions.

Also, third pallet moving mechanism 296 is provided below second nozzleinspection device 138. Third pallet moving mechanism 296 is a mechanismfor moving nozzle pallet 152 between a pallet carrier 180 circulated toa specified position by carrier circulating mechanism 182, and aposition at which flow amount inspection and code reading inspection canbe performed by second nozzle inspection device 138 (hereinaftersometimes referred to as “second inspection position”). In detail, thirdpallet moving mechanism 296 includes rails 298 extending in a front/reardirection, and controllably slides nozzle pallet 152 along rails 298.The rear end of rails 298 links with rails 183 of pallet carrier 180circulated to a specified position by carrier circulating mechanism 182.Thus, it is possible to move nozzle pallet 152 between a pallet carrier180 circulated to a specified position by carrier circulating mechanism182 and the second inspection position. Note that, in the diagram, anozzle pallet 152 is shown moved to the second inspection position.

(f) Nozzle Cleaning Device

Nozzle cleaning device 140 is a device that performs cleaning and dryingof suction nozzles 62 and is provided below second nozzle inspectiondevice 138. As shown in FIG. 20, nozzle cleaning device 140 includeshousing 300; cleaning and drying of suction nozzles 62 is performedinside housing 300. FIG. 21 shows nozzle cleaning device 140 withouthousing 300 to illustrate the configuration of nozzle cleaning device140.

As shown in FIG. 21, nozzle cleaning device 140 includes nozzle cleaningmechanism 302 and nozzle drying mechanism 304. Nozzle cleaning mechanism302 is configured from upper cleaning unit 306 and lower cleaning unit308. Upper cleaning unit 306 and lower cleaning unit 308 have similarconfigurations and are provided facing each other in an up/downdirection. Each unit 306 and 308 includes support frame 310, spraynozzle 312, and spray nozzle moving mechanism 314.

Support frame 310 a of upper cleaning unit 306 is fixed to the top ofhousing 300; support frame 310 b of lower cleaning unit 308 is fixed tothe inside bottom of housing 300. Spray nozzle 312 a of upper cleaningunit 306 is provided on the upper end inside housing 300 extending in aleft/right direction, and is slidably supported in a front/reardirection by support frame 310 a via the top of housing 300. Spraynozzle 312 a is controllably slidable in a front/rear direction by spraynozzle moving mechanism 314 a of upper cleaning unit 306. Spray nozzle312 b of lower cleaning unit 308 is provided on the lower end insidehousing 300 extending in a left/right direction, and is slidablysupported in a front/rear direction by support frame 310 b via the topof housing 300. Spray nozzle 312 b is controllably slidable in afront/rear direction by spray nozzle moving mechanism 314 b of lowercleaning unit 308. Note that multiple spray holes (not shown) are formedin the bottom of spray nozzle 312 a and multiple spray holes 316 areformed in the upper surface of spray nozzle 312 b.

Nozzle drying mechanism 304 includes multiple ventilation pipes 320provided to the rear of nozzle cleaning mechanism 302. Multipleventilation pipes 320 are provided extending in a left/right directionon the top and bottom of housing 300. Ventilation pipes 320 areconnected to a ventilation device (not shown) via a heater (not shown)such that warm air is blown through ventilation pipes 320. Also,multiple ventilation holes (not shown) are formed in ventilation pipes320 on the attachment section to housing 300; through-holes are formedin the top and bottom of housing 300 to correspond to these ventilationholes. Thus, warm air is blown in housing 300 by nozzle drying mechanism304.

Also, fourth pallet moving mechanism 330 is provided inside housing 300.Fourth pallet moving mechanism 330 is a mechanism for moving nozzlepallet 152 between a pallet carrier 180 circulated to a specifiedposition by carrier circulating mechanism 182, and a position at whichcleaning of suction nozzles 62 can be performed by nozzle cleaningmechanism 302 (hereinafter sometimes referred to as “cleaningposition”). In detail, fourth pallet moving mechanism 330 includes rails332 provided on inside walls of housing 300 and extending in afront/rear direction, and controllably slides nozzle pallet 152 alongrails 332. The front end of rails 332 is positioned between uppercleaning unit 306 and lower cleaning unit 308. On the other hand, therear end of rails 332 links with rails 183 of pallet carrier 180circulated to a specified position by carrier circulating mechanism 182.Thus, it is possible to move nozzle pallet 152 between a pallet carrier180 circulated to a specified position by carrier circulating mechanism182 and the cleaning position. Note that, in the diagram, a nozzlepallet 152 is shown moved to the cleaning position.

Further, the bottom surface of housing 300 functions as a water storagetank; cleaning water collected in the bottom surface of housing 300 iscirculated and supplied to spray nozzles 312 of upper cleaning unit 306and lower cleaning unit 308. In detail, as shown in FIG. 22, cleaningwater 338 is collected at the bottom surface of housing 300, and an endof drainage path 340 is open in the bottom surface of housing 300.Drainage path 340 extends downwards, and filter 342 for removingimpurities is provided in drainage path 340. By this, cleaning water 338collected in the bottom surface of housing 300 flows through drainagepath 340 and impurities are removed by filter 342. Here, cleaning water338 flows due to its own weight, thus there is no need to provide a pumpor the like for causing the cleaning water to flow from the bottomsurface of housing 300.

Cleaning water 338 from which impurities have been removed is fed intobooster pump 344 and sent to water supply path 346 by booster pump 344.Water supply path 346 is connected to spray nozzles 312 of uppercleaning unit 306 and lower cleaning unit 308, and cleaning water 338 isjetted from spray nozzles 312. Also, separating plate 348 is providedbetween lower cleaning unit 308 and cleaning water 338 collected in thebottom surface of housing 300. Separating plate 348 is provided in aninclined state, and sheet-form sponge 350 is affixed to the uppersurface of separating plate 348. Thus, cleaning water 338 jetted fromspray nozzles 312 falls onto separating plate 348. When this occurs,cleaning water 338 is prevented from bouncing by sponge 350 affixed tothe upper surface of separating plate 348. Also, cleaning water 338flows over separating plate 348 provided in an inclined state and iscollected again in the bottom surface of housing 300. In this way,cleaning water 338 is circulated in nozzle cleaning device 140. Notethat, separating plate 348 provided below lower cleaning unit 308extends below nozzle drying mechanism 304.

Management of Suction Nozzles by the Nozzle Management Device

With the nozzle management device 110 with the above configuration, workof housing suction nozzles 62 loaded on a nozzle tray 88 into nozzlemanagement device 110, work of inspecting suction nozzles 62 by firstnozzle inspection device 136, work of inspecting suction nozzles 62 bysecond nozzle inspection device 138, work of cleaning/drying suctionnozzles 62, work of loading suction nozzles 62 for which inspection workand cleaning/drying work has been completed to nozzle tray 88, and workof discarding defective nozzles are performed. Described below is theoperating state of nozzle management device 110 while the above work isbeing performed.

(a) Work of Housing Suction Nozzles in the Nozzle Management Device

During work of housing suction nozzles 62 into nozzle management device110, as shown in FIG. 15, an operator sets a nozzle tray 88 on whichsuction nozzles 62 are loaded onto fixed stage 210 or movable stage 212inside drawer 118 of nozzle management device 110. Note that, whennozzle tray 88 is set on movable stage 212, an operator may set nozzletray 88 on movable stage 212, or a nozzle tray 88 housed in tray carrier200 may be set on movable stage 212 by stage moving mechanism 214. Also,with nozzle management device 110, a pallet carrier 180 housing nozzlepallet 152 onto which suction nozzles 62 can be loaded is moved to aposition corresponding to first pallet moving mechanism 218 by theoperation of carrier circulating mechanism 182.

Continuing, nozzle pallet 152 housed in the pallet carrier 180 is movedto the nozzle transfer position by the operation of first pallet movingmechanism 218. Next, nozzle pallet 152 moved to the nozzle transferposition and nozzle tray 88 set on fixed stage 210 or movable stage 212is made into the fully exposed state by a plate moving mechanism.Continuing, transfer head 206 is moved above nozzle tray 88 and nozzlepallet 152 by the operation of head moving device 207, and each 2D code94 and 157 on nozzle tray 88 and nozzle pallet 152 is imaged by camera208. Thus, characteristic information such as an ID number of nozzletray 88 and nozzle pallet 152 is obtained.

Continuing, transfer head 206 moves above nozzle tray 88 by operation ofhead moving device 207 and 2D code 74 of the suction nozzle 62 which isthe transfer target is imaged by camera 208. By this, characteristicinformation such as an ID number of suction nozzle 62 which is thetransfer target is obtained. Then, suction nozzle 62 which is thetransfer target is held by holding chuck 209.

When suction nozzle 62 which is the transfer target is held by holdingchuck 209, transfer head 206 moves above nozzle pallet 152 which is thetransfer destination of suction nozzle 62 by the operation of headmoving device 207, and suction nozzle 62 which is held is transferred toa loading hole 158 of nozzle pallet 152. By this, suction nozzle 62 istransferred from nozzle tray 88 to nozzle pallet 152. Note that, duringtransfer of suction nozzle 62, a link between the ID number of nozzlepallet 152 which is the transfer destination, the ID number of thetransferred suction nozzle 62, and the loading position in the nozzlepallet 152 is created and stored.

Also, when suction nozzle 62 is transferred, if there are no emptyloading holes 158 in the transfer destination nozzle pallet 152, that isa suction nozzle 62 has been loaded in all the loading holes 158, theholding chuck 209 which is holding a suction nozzle 62 is moved abovetransfer plate 220 by the operation of head moving device 207, andsuction nozzle 62 is provisionally loaded in loading hole 221 of loadingplate 220.

When transfer of suction nozzles 62 to nozzle pallet 152 is complete,that nozzle pallet 152 is housed in pallet carrier 180 by the operationof first pallet moving mechanism 218. Thus, the work of housing suctionnozzles 62 in nozzle management device 110 is completed.

Note that, nozzle tray 88 which becomes empty due to the loading ofsuction nozzles 62 onto nozzle pallet 152 is collected by the operatorfrom fixed stage 210 or movable stage 212. Alternatively, if nozzle tray88 is set on movable stage 212, nozzle tray 88 which becomes empty dueto the loading of suction nozzles 62 onto nozzle pallet 152 may behoused in tray carrier 200 by the operation of stage moving mechanism214.

(b) Work of Inspecting Suction Nozzles by the First Nozzle InspectionDevice

During inspection work of suction nozzles 62, when inspection of tipsections is performed by first nozzle inspection device 136, a palletcarrier 180 housing a prescribed nozzle pallet 152 is moved, as shown inFIG. 18, to a position corresponding to second pallet moving mechanism226 by the operation of carrier circulating mechanism 182. Suctionnozzles 62 which are targets for inspection are housed in the prescribednozzle pallet 152.

Continuing, nozzle pallet 152 housed in the pallet carrier 180 is movedto the first inspection position by the operation of second palletmoving mechanism 266. Then, camera device 236 of inspection unit 230 ismoved below suction nozzle 62 which is the inspection target by unitmoving device 232, and suction tube 68 of suction nozzle 62 which is theinspection target is imaged by camera device 236. Thus, image data ofsuction tube 68 of the suction nozzle 62 is obtained and the state ofsuction tube 68 is inspected based on the image data. If a problem suchas a bent suction tube 68, a chipped tip of suction tube 68, a deformedsuction tube 68, and so on is found by inspection based on the imagedata, examination is performed by first nozzle inspection device 136.

In detail, in a case in which a problem with suction tube 68 is found byinspection based on the image data, camera device 236 is moved belowreference pipe 174 of nozzle pallet 152 by unit moving device 232, andreference pipe 174 is imaged by camera device 236. Then, the state ofreference pipe 174 is inspected based on the acquired image data. Anormal condition suction tube 68 is attached to the lower end ofreference pipe 174, so if first nozzle inspection device is operatingcorrectly, the suction tube 68 of reference pipe 174 will naturally bedetermined to be normal in the inspection based on the image data ofreference pipe 174. Thus, in a case in which a problem is found withsuction tube 68 by inspection based on image data of suction nozzle 62which is the inspection target, and suction nozzle 68 of reference pipe174 is determined to be normal by inspection based on the image data ofreference pipe 174, the problem with suction tube 68 of suction nozzle62 which is the target for inspection is confirmed and suction nozzle 62which is the target for inspection is recognized as a defective nozzle.Conversely, in a case in which a problem is found with suction tube 68by inspection based on image data of suction nozzle 62 which is theinspection target, and suction nozzle 68 of reference pipe 174 isdetermined to have a problem by inspection based on the image data ofreference pipe 174, it is taken that first nozzle inspection device 136cannot perform inspection properly, and suction nozzle 62 which is thetarget for inspection is not recognized as a defective nozzle.

Also, when retreating force inspection is performed by first nozzleinspection device 136, the tip section of suction tube 68 of suctionnozzle 62 is made to contact load cell 240, and load cell 240 is movedsuch that suction tube 68 of suction nozzle 62 retreats inside body pipe64. Here, the load detected by load cell 240 is the load arising whenrelative movement occurs between body pipe 64 and suction tube 68, thatis, the retreating load of suction tube 68 into body pipe 64. Becausethis load is relatively small, a load cell 240 with high sensitivity isused, thus load cell 240 is easily damaged in a case in which there isno relative movement between body pipe 64 and suction tube 68.

In detail, for example, there are cases in which there is virtually norelative movement between body pipe 64 and suction tube 68 if body pipe64 and suction tube 68 become stuck by an impurity or the like gettinginside suction nozzle 62. For this kind of suction nozzle 62, if a loadcell 240 with a measurement range of 0 to 100 gf is contacted againstsuction nozzle 62, because there is virtually no relative movementbetween body pipe 64 and suction tube 68, in a case in which the loadfrom load cell 240 being moved is 100 gf or greater, a load of 100 gf orgreater is applied to load cell 240, meaning that load cell 240 may bedamaged. Thus, it is necessary to move load cell 240 with a load smallerthan 100 gf. However, inspection unit 230 in which load cell 240 isprovided is relatively large and heavy, thus the inertia is large whenmoving inspection unit 230, and it is difficult to move inspection unit230 with a load smaller than 100 gf.

Considering this problem, with the first nozzle inspection device 136,relative movement of body pipe 64 and suction tube 68 of suction nozzle62 is checked using metal contact tool 242, with retreat forceinspection using load cell 240 being performed on suction nozzles 62 forwhich the relative movement state of body pipe 64 and suction tube 68 isgood. Specifically, metal contact tool 242 provided on inspection unit230 is moved below suction nozzle 62 that is the target for inspectionby unit moving device 232, and inspection unit 230 is moved up such thatmetal contact tool 242 contacts the lower end of suction tube 68 ofsuction nozzle 62. Here, inspection unit 230 is moved up such thatsuction tube 68 of suction nozzle 62 retreats inside body pipe 64.

By inspection unit 230 being moved up, suction tube 68 is pushed up bymetal contact tool 242, and in a case where suction tube 68 hasretreated inside body pipe 64 by a first set amount, it is determinedthat the state of the relative movement between body pipe 64 and suctiontube 68 is good. On the other hand, if suction tube 68 does not retreatinside body pipe 64 by the first set amount even though suction tube 68is being pushed up by metal contact tool 242, body pipe 64 and suctiontube 68 are stuck to each other, and it is determined that the relativemovement between them is not good.

Note that, metal contact tool 242 that pushes suction tube 68 of suctionnozzle 62 has a rigid body that does not break easily, thus it ispossible to move inspection unit 230 up with a fairly large load.However, damage to suction nozzle 62 should be avoided in a case inwhich body pipe 64 and suction tube 68 are stuck such that relativemovement does not occur between them, and the load with which inspectionunit 230 is moved up is set to be smaller than the load at which damageoccurs to suction nozzle 62 when suction nozzle 62 is pushed in an axisline direction.

The retreat force for a suction nozzle 62 determined to have a goodstate of relative movement between body pipe 64 and suction tube 68using metal contact tool 242 is measured using load cell 240. However,for suction nozzle 62 for which it is judged that the state of relativemovement between body pipe 64 and suction tube 68 is not good,measurement of the retreat force using load cell 240 is not performed.By this, it is possible to avoid measuring suction nozzles 62 for whichthere is a tendency for the load to exceed the measurement range of loadcell 240, and it is possible to avoid damaging load cell 240. Also,because a relatively large load is applied to suction nozzle 62 in therelative movement direction of body pipe 64 and suction tube 68, thereare cases in which, when body pipe 64 and suction tube 68 are stuck byimpurities or the like, the impurities are removed due to the heavyload. That is, there are cases in which the heavy load results inrelative movement becoming possible again for suction nozzles for whichthere was virtually no relative movement between body pipe 64 andsuction tube 68.

Next, in a case in which it is determined that the state of relativemovement between body pipe 64 and suction tube 68 is good, load cell 240provided on inspection 230 is moved below that suction nozzle 62 by unitmoving device 232, and inspection unit 230 is moved up such that loadcell 240 contacts the lower end of suction tube 68 of suction nozzle 62.Here, when suction tube 68 of suction nozzle 62 retreats inside bodypipe 64, the retreat force of suction tube 68 is measured using loadcell 240. However, as described above, among suction nozzles 62 thereare suction nozzles with an internal spring (hereinafter also referredto as “nozzle with an internal spring”) and there are suction nozzleswithout an internal spring (hereinafter also referred to as “nozzlewithout a spring”), and there is a different method for measuring theretreat force for nozzles with an internal spring and nozzles without aspring.

Specifically, for example, FIG. 23 shows the measurement values of loadcell 240, that is, the change in the load, when suction tube 68 retreatsinside body pipe 64 by the first set amount by moving inspection unit230 up and contacting load cell 240 on the lower end of suction tube 68of a nozzle with an internal spring. The solid line shown in the graphshows the change over time of the measurement values of load cell 240for a suction nozzle (hereinafter also referred to as a “defectivenozzle”) for which it is difficult for suction tube 68 to retreat insidebody pipe 64 due to the presence of an impurity, damage, or the like. Incontrast, the dotted line shown in the graph shows the change over timeof the measurement values of load cell 240 for a suction nozzle(hereinafter also referred to as a “good nozzle”) for which suction tube68 retreats inside body pipe 64 correctly.

As understood from the figure, when load cell 240 contacts the tip ofsuction tube 68 of the nozzle with an internal spring by inspection unit230 being moved up, the measurement value of load cell 240 becomes largerapidly. After increasing by a large amount, the measurement value ofload cell 240 decreases and then converges to a generally fixed value.This is due to the fact that, because elastic force is applied tosuction nozzle 68 of the nozzle with the internal spring, a large loadis applied to load cell 240 when it is contacted against suction tube68. Because this kind of load at the moment of collision is much largerthan the load that occurs when suction tube 68 actually retreats, it isnot desirable to include this load in the measurement values used fordetermination. In consideration of this, when inspecting the retreatforce of suction tube 68 for a nozzle with an internal spring, valuesare extracted from the measurement values of load cell 240 such thatvalues from the moment when suction tube 68 collides with load cell 240are excluded.

In detail, measurement values of load cell 240 are monitored for a timeafter a preset setting value has been exceeded. This setting value isset to be value smaller than the load required for suction tube 68 toretreat inside body pipe 64 for a good nozzle. Then, extraction ofmeasurement values is performed from a time (t1) at which themeasurement value of load cell 240 exceeds the setting value until atime (t2=t1+T) after when specified time T has elapsed. Specifically,measurement values are extracted continuously for a given period. Then,an average value is calculated after removing the maximum and minimumloads from the extracted loads. Note that, extraction of measurementvalues continuously over a given period is performed N times untilsuction tube 68 has retreated inside body pipe 64 by the first setamount. That is, N number of average values of extracted loads arecalculated. Then, it is determined whether the maximum calculated valueamong the calculated N number of values exceeds a threshold value. Ifthe maximum calculated value exceeds the threshold value, it isdetermined that the nozzle with an internal spring that is theinspection target is a defective nozzle; if the maximum calculated valueis equal to or less than the threshold value, it is determined that thenozzle with an internal spring that is the inspection target is a goodnozzle. In this manner, it is possible to appropriately inspect theretreat force of suction tube 68 of a nozzle with an internal spring byusing measurement values of load cell 240 excluding measurement valuesfrom the moment that suction tube 68 collides with load cell 240.

On the other hand, FIG. 24 shows the measurement values of load cell240, that is, the change in the load, when suction tube 68 retreatsinside body pipe 64 by the first set amount by moving inspection unit230 up and contacting load cell 240 on the lower end of suction tube 68of a nozzle without a spring. The solid line in the graph shows thechange over time of the measurement values of load cell 240 for adefective nozzle and the dotted line in the graph shows the change overtime of the measurement values of load cell 240 for a good nozzle.

As understood from the figure, when load cell 240 contacts the tip ofsuction tube 68 of the nozzle without a spring by inspection unit 230being moved up, the measurement value of load cell 240 becomes largerapidly. However, because elastic force is not applied to suction nozzle68 of the nozzle without a spring, the load when load cell 240 collideswith suction tube 68 and the load when suction tube 68 retreats aresubstantially the same. Thus, when inspecting the retreat force ofsuction tube 68 of a nozzle without a spring, measurement values areextracted when the measurement value of load cell 240 exceeds a setvalue. Note that, the method of extracting measurement values for anozzle without a spring is the same as the method of extractingmeasurement values for a nozzle with an internal spring. Then, based onthe extracted measurement values, in a similar manner to that fornozzles with an internal spring, N number of average values of the loadare calculated, and it is determined whether the maximum calculatedvalue among the calculated N number of values exceeds a threshold value.By this, it is also possible to appropriately inspect the retreat forceof suction tube 68 for nozzles without a spring.

When the above work of suction tube 68 tip section inspection andretreat force inspection is complete, nozzle pallet 152 is housed inpallet carrier 180 by operation of second pallet moving mechanism 266.Note that, inspection work results are linked with the ID number ofsuction nozzle 62 which is the target for inspection and stored.

(c) Work of Inspecting Suction Nozzles by the Second Nozzle InspectionDevice

During inspection work of suction nozzles 62, when air flow amountinspection is performed by second nozzle inspection device 138, a palletcarrier 180 housing a prescribed nozzle pallet 152 is moved, as shown inFIG. 19, to a position corresponding to third pallet moving mechanism296 by the operation of carrier circulating mechanism 182. Suctionnozzles 62 which are targets for inspection are housed in the prescribednozzle pallet 152.

Continuing, nozzle pallet 152 housed in the pallet carrier 180 is movedto the second inspection position by the operation of third palletmoving mechanism 296. Then, air supply device 276 of inspection head 270is moved above suction nozzle 62 which is the target for inspection byhead moving device 272. Air supply device 276 lowers air joint 278 byraising/lowering mechanism 282 and connects air joint 278 to body pipe64 of suction nozzle 62 which is the target for inspection. When airjoint 278 is connected to body pipe 64, air supply device 276 suppliesair to the connected body pipe 64. Then, the air pressure while air isbeing supplied is measured by air pressure sensor 280 and it isdetermined whether the air pressure is larger than a first thresholdpressure. When air is supplied to a normal condition suction nozzle 62,because air passes through suction nozzle 62, the air pressure measuredby air pressure sensor 280 is relatively low. Conversely, when air issupplied to a suction nozzle 62 which is blocked or the like, air doesnot pass so easily through suction nozzle 62, thus the air pressuremeasured by air pressure sensor 280 is relatively high. Therefore,suction nozzles 62 for which the air pressure measured by air pressuresensor 280 is larger than a first threshold pressure are recognized asdefective nozzles.

Note that, with air flow amount inspection, not only is recognition ofdefective nozzles performed, but recognition is performed of suctionnozzles 62 which have a high probability of becoming defective nozzles,that is suction nozzles of which the condition has deteriorated(hereinafter sometimes referred to as “deteriorated nozzles”). Indetail, a second threshold pressure which is lower than first thresholdpressure is set. Then, it is determined whether the air pressuremeasured by air pressure sensor 280 is larger than a second thresholdpressure, and suction nozzles 62 for which the air pressure is largerthan the second threshold pressure are recognized as deterioratednozzles. In other words, suction nozzles 62 for which, although not tothe extent of a defective nozzle, air does not pass easily through thesuction nozzle 62 to a certain extent are recognized as deterioratednozzles.

Note that, during air flow amount inspection, air sent from a compressor(not shown) to air supply device 276 is supplied to suction nozzle 62,and the air pressure measured by air pressure sensor 280 changesdepending on the operating conditions of the compressor. Therefore,before performing air flow amount inspection, air is supplied toreference pipe 174, and a first threshold pressure and a secondthreshold pressure are set based on the air pressure measured by airpressure sensor 280 as air is supplied to reference pipe 174.

Also, when performing code reading inspection, camera 274 of inspectionhead 270 is moved above suction nozzle 62 which is the target ofinspection by head moving device 272, and 2D code 74 provided on flange66 of suction nozzle 62 which is the target for inspection is imaged bycamera 274. Thus, image data of 2D code 74 of suction nozzle 62 which isthe target for inspection is obtained, and usually characteristicinformation of suction nozzle 62 such as an ID number is obtained basedon the image data. However, if dirt and so on is on 2D code 74, thereare cases in which characteristic information of suction nozzle 62cannot be obtained based on the image data. Therefore, it is desirableto recognize suction nozzles 62 for which characteristic information ofsuction nozzle 62 cannot be obtained based on the image data asdefective nozzles.

However, there is a worry that characteristic information of suctionnozzle 62 cannot be obtained based on the image data even if there nodirt and so on 2D code 74, if there is a problem with camera 274 and soon. Thus, in cases in which characteristic information of suction nozzle62 cannot be obtained based on image data, examination of camera 274 andso on is performed.

In detail, 2D code 74 provided on flange 66 of reference nozzle 172 isimaged by camera 274, and it is determined whether characteristicinformation of reference nozzle 172 is obtained based on the image data.So long as there is no dirt and so on on 2D code 74 of reference nozzle172, and there are no problems which camera 274 and so on,characteristic information of reference nozzle 172 will be obtainedbased on the image data. Thus, if characteristic information cannot beobtained based on image data of 2D code 74 of suction nozzle 62 which isthe target for inspection, and characteristic information is obtainedbased on image data of 2D code 74 of reference nozzle 172, suctionnozzle 62 which is the target for inspection is recognized as adefective nozzle. Conversely, if characteristic information cannot beobtained based on image data of 2D code 74 of suction nozzle 62 which isthe target for inspection, and characteristic information is notobtained based on image data of 2D code 74 of reference nozzle 172, itis taken that there is a problem with camera 274 and so on, and suctionnozzle 62 which is the target for inspection is not recognized as adefective nozzle.

(d) Suction Nozzle Cleaning and Drying Work

When cleaning/drying work of suction nozzles 62 is performed, as shownin FIGS. 20 and 21, a pallet carrier 180 housing a prescribed nozzlepallet 152 is moved to a position corresponding to fourth pallet movingmechanism 330 by the operation of carrier circulating mechanism 182.Suction nozzles 62 which are targets for cleaning are housed in theprescribed nozzle pallet 152.

Continuing, nozzle pallet 152 housed in the pallet carrier 180 is movedto the nozzle cleaning position by the operation of fourth pallet movingmechanism 330. Then, high pressure water is supplied to each spraynozzle 312 of upper cleaning unit 306 and lower cleaning unit 308, andthe high pressure water is sprayed from spray holes 316 of spray nozzles312 towards nozzle pallet 152. Here, spray nozzles 312 are movedforwards/backwards by spray nozzle moving mechanism 314, that is, aremoved in a direction intersecting the axis line of suction nozzleshoused in nozzle pallet 152. Thus, high pressure water is sprayed on allsuction nozzles 62 housed in nozzle pallet 152 such that cleaning ofsuction nozzles 62 is performed.

However, in cases in which a viscous fluid such as solder is adhered tothe tip section of suction tube 68 of suction nozzle 62, it is difficultto remove the adhered matter by simply spraying high pressure watertowards suction tube 68. It is especially difficult to remove adheredmatter such as viscous fluid for a suction nozzle 62 for which thediameter of suction tube 68 gets larger as you move towards the tipsection. In detail, for a suction nozzle 62 for which the diameter ofsuction tube 68 gets larger as you move towards the tip section, asshown in FIG. 25, when high pressure water is sprayed from spray nozzle312 of lower cleaning unit 308 towards suction tube 68 of suction nozzle62 housed in nozzle pallet 152, the high pressure water directlycontacts the bottom surface of suction tube 68. Thus, matter adhered tothe bottom surface of suction tube 68 is easily removed by high pressurewater. However, adhered matter 360 on the outer side surface of the tipsection of suction tube 68 is not directly contacted by the highpressure water. This is because a sharp angle is created between thebottom surface and the outer side surface of suction tube 68 due to thediameter of the tip section of suction tube 68 getting larger as youmove towards the tip section, which means that the high pressure watersprayed from below does not reach the outer side surface of the tipsection of suction tube 68. Therefore, adhered matter 360 adhered to theouter side surface of suction tube 68 cannot be removed appropriatelysimply by spraying high pressure water towards suction tube 68.

Considering this issue, as shown in FIG. 26, socket 370 for cleaning thesuction tube of suction nozzle 62 is fixed to the lower surface ofnozzle pallet 152. In detail, socket 370 has a largely cuboid shape andthrough-hole 371 is formed in socket 370 in a vertical direction. Theinner diameter of through-hole 371 is larger than the outer diameter ofsuction tube 68 of suction nozzle 62 and socket 370 is fixed to thelower surface of nozzle pallet 152 such that the tip section of suctiontube 68 is inserted inside through-hole 371. The internal surface ofthrough-hole 371 is configured from first internal surface 372 andsecond internal surface 374. First internal surface 372 has an internaldiameter that does not change in the vertical direction, and ispositioned at the lower side of the internal surface of through-hole371. On the other hand, second internal surface 374 is tapered so as theinternal diameter becomes smaller towards the top, and is connected tothe upper end of first internal surface 372. Note that, second internalsurface 374 is positioned around the tip of suction tube 68 insertedinto through-hole 371. Also, drainage path 376 that extends to the outerwall surface of socket 370 is formed in an upper section of secondinternal surface 374.

As shown in FIG. 27, when high pressure water is jetted from spraynozzle 312 of lower cleaning unit 308 towards suction tube 68 insertedinto through-hole 371 of socket 370 with the above configuration, highpressure water sprayed from spray nozzle 312, of course, directlycontacts the bottom surface of suction tube 68. Also, high pressurewater jetted from spray nozzle 312 collides with second internal surface374 and contacts the outer side surface of suction nozzle 62. That is,the jetting direction of high pressure water jetted from spray nozzle312 is changed by second internal surface 374 such that high pressurewater contacts the outer side surface of suction nozzle 62. Thus, it ispossible to appropriately remove adhered matter not only from the bottomsurface of suction tube 68, but also from the outer side surface ofsuction tube 68. The high pressure water sprayed inside through-hole 371of socket 370, after cleaning suction tube 68, drains out of the outerwall of socket 370 via drainage path 376.

When cleaning suction nozzle 62, as described above, spray nozzle 312 ismoved in a forwards/backwards direction by spray nozzle moving mechanism314. Accordingly, high pressure water contacts the entire tip section ofsuction tube 68, and adhered matter 360 is reliably removed from the tipsection of suction tube 68. In detail, multiple spray holes 316 of spraynozzle 312 are arranged in a straight line, and high pressure water issprayed as a curtain from those multiple spray holes 316. Also, spraynozzle 312 is moved by spray nozzle moving mechanism 314 such that thehigh pressure water sprayed as a curtain cuts across the diameterdirection of through-hole 371 of socket 370. When high pressure watersprayed as a curtain cuts across the diameter direction of through-hole371 of socket 370, the locations at which high pressure water contactssocket 370 and suction tube 68 of suction nozzle 62 change as shown inFIGS. 28 to 31. FIGS. 28 to 31 show socket 370 from below with suctiontube 68 inserted into through-hole 371. Also, marks 377 shown by solidlines in the figures show locations at which high pressure water sprayedfrom spray nozzle 312 directly contacts socket 370 or suction tube 68;marks 378 shown by dotted lines in the figures show locations at whichthe jetting direction of the high pressure water is changed by secondinternal surface 374, that is, locations at which high pressure watercontacts suction tube 68 having been reflected off second internalsurface 374.

First, when high pressure water is sprayed towards one end ofthrough-hole 371 in the diameter direction, as shown in FIG. 28, highpressure water reflected by second internal surface 374 contacts theouter side surface of suction tube 68 at one end in the diameterdirection. Then, when spray nozzle 312 is moved towards the other end ofthrough-hole 371 in the diameter direction, as shown in FIG. 29, highpressure water reflected by second internal surface 374 contacts theouter side of suction tube 68 at different locations to those shown inFIG. 28. Then, when spray nozzle 312 is moved further towards the otherend of through-hole 371 in the diameter direction, as shown in FIG. 30,high pressure water reflected by second internal surface 374 contactsthe outer side of suction tube 68 at different locations to those shownin FIG. 29. Also, high pressure water sprayed from spray nozzles 312contacts the bottom surface of suction tube 68. Then, when spray nozzle312 is moved further towards the other end of through-hole 371 in thediameter direction, as shown in FIG. 31, high pressure water reflectedby second internal surface 374 contacts the outer side of suction tube68 at different locations to those shown in FIG. 30. Also, high pressurewater sprayed from spray nozzles 312 contacts the bottom surface ofsuction tube 68 at different locations to those in FIG. 30. Accordingly,by moving spray nozzles 312 such that high pressure water sprayed in acurtain cuts across through-hole 371 of socket 370 in the diameterdirection, high pressure water contacts the entire bottom surface ofsuction tube 68, and the entire outer side surface of suction tube 68,such that adhered matter 360 is reliably removed from the tip section ofsuction tube 68.

Next, when cleaning of suction nozzles 62 is complete, nozzle pallet 152is moved to the position at which nozzle drying mechanism 304 isarranged (hereinafter sometimes referred to as “drying position”) byfourth pallet moving mechanism 330. Then, warm air is supplied toventilation pipes 320 such that warm air is blown onto suction nozzles62 housed in nozzle pallet 152. Thus, drying is performed of suctionnozzles 62 cleaned by high pressure water. Note that, drying of suctionnozzle 62 by blowing warm air is performed inside housing 300, and thebottom surface of housing 300, as described above, functions as astorage tank, with cleaning water used in nozzle cleaning mechanism 302collecting there. Thus, there is a problem in that cleaning watercollected on the bottom surface of housing 300 may be blown up by thewarm air that is blown such that the cleaning water adheres to suctionnozzle 62 again. However, as described above, separating plate 348 isprovided between nozzle pallet 152 positioned at the drying position andthe cleaning water collected on the bottom surface of housing 300, so asto prevent cleaning water from being blown up. By this, it is possibleto prevent cleaning water from adhering again to suction nozzle 62during drying of suction nozzle 62.

Further, when drying work of suction nozzles 62 is complete, nozzlepallet 152 is housed in pallet carrier 180 by the operation of fourthpallet moving mechanism 330. Note that, with regard to suction nozzles62 for which cleaning/drying are complete, information indicating thatcleaning/drying work are complete is linked to the ID number of thesuction nozzle 62 and stored.

(e) Work of Loading to a Nozzle Tray by the Nozzle Management Device

When work is performed for loading suction nozzles 62 housed in nozzlemanagement device 110 onto a nozzle tray 88, as shown in FIG. 15, anoperator sets a nozzle tray 88 onto which suction nozzles 62 can beloaded onto fixed stage 210 or movable stage 212. Alternatively, anozzle tray 88 onto which suction nozzles 62 can be loaded is set onmovable stage 212 by the operation of stage moving mechanism 214. Also,with nozzle management device 110, a pallet carrier 180 housing aprescribed nozzle pallet 152 is moved to a position corresponding tofirst pallet moving mechanism 218 by the operation of carriercirculating mechanism 182. Suction nozzles 62 which are planned to beloaded onto nozzle tray 88 are housed in the prescribed nozzle pallet152.

Continuing, nozzle pallet 152 housed in the pallet carrier 180 is movedto the nozzle transfer position by the operation of first pallet movingmechanism 218. Then, suction nozzles 62 loaded on nozzle pallet 152 aretransferred to the nozzle tray 88 by nozzle transfer device 134. Notethat, work of loading suction nozzles 62 loaded on nozzle pallet 152 tonozzle tray 88 is the same as work of loading suction nozzles 62 loadedon nozzle tray 88 to nozzle pallet 152. However, before being loaded onnozzle tray 88, suction nozzles 62 loaded on nozzle pallet 152 are driedby blow device 227.

In detail, as described above, suction nozzles 62 are cleaned by nozzlecleaning device 140 while loaded in nozzle pallet 152, and then driedafter cleaning; however, due to the construction of nozzle pallet 152,it is difficult to reliably dry suction nozzles 62 using nozzle cleaningdevice 140. Specifically, as shown in FIGS. 13 and 14, for suctionnozzles 62 housed in nozzle pallet 152, flange 66 is sandwiched by baseplate 154 and cover plate 156. However, body pipe 64 and suction tube 68protrude from nozzle pallet 152. Thus, when suction nozzle 62 is cleanedwhile housed in nozzle pallet 152, water gets between base plate 154 andcover plate 156 such that cleaning water adheres to flange 66. Further,with nozzle cleaning device 140, after suction nozzles 62 are cleaned,suction nozzles 62 are dried by warm air being blown while suctionnozzles 62 are housed in nozzle pallet 152, but water that has gottenbetween base plate 154 and cover plate 156 is not blown off. Thus, thereis a tendency for cleaning water to adhere to flange 66 of suctionnozzle 62. However, cleaning water adhered to body pipe 64 and suctiontube 68 is blown off by warm air being blown, such that body pipe 64 andsuction tube 68 are dried.

Considering this problem, in a case when suction nozzles 62 aretransferred from nozzle pallet 152 to nozzle tray 88, when suctionnozzle 62 that is the transfer object is held by holding chuck 209,transfer head 206 moves above blow device 227 by operation of headmoving device 207. Note that, holding chuck 209 holds an upper sectionof body pipe 64 of suction nozzle 62, and because the upper section ofbody pipe 64 is dry as described above, it is possible for holding chuck209 to hold a dry location of suction nozzle 62, such that suctionnozzle 62 can be appropriately held.

When moving head 206 moves above blow device 227, head moving device 207lowers transfer head 206, and as shown in FIG. 17, inserts suctionnozzle 62 held by holding chuck 209 inside main body section 228 of blowdevice 227. Here, transfer head 206 is lowered such that air ejectionhole 229 is positioned to the side of flange 66 of suction nozzle 62.Then, blow device 227 blows air from air ejection hole 229 by operationof the air ejection device. When air is blown from air ejection hole229, holding chuck 209 is rotated by operation of a rotating mechanismwith suction nozzle 62 being held, such that air is blown on the entiresurface of flange 66 of suction nozzle 62. By this, cleaning wateradhered to flange 66 is blown off, and flange 66 is appropriately dried.Also, when drying of flange 66 is complete, transfer head 206 is movedabove nozzle tray 88 by operation of head moving device 207, and heldsuction nozzle 62 is housed in loading hole 96 of nozzle tray 88. Inthis manner, with nozzle management device 110, suction nozzles 62 thathave been reliably dried are housed in nozzle tray 88. Note that, nozzlepallet 152 for which transfer of suction nozzles 62 to nozzle tray 88 iscomplete is housed in pallet carrier 180 by the operation of firstpallet moving mechanism 218.

(f) Work of Discarding Defective Nozzles

As shown in FIG. 15, during work of discarding a defective nozzle, apallet carrier 180 housing a prescribed nozzle pallet 152 is moved to aposition corresponding to first pallet moving mechanism 218 by theoperation of carrier circulating mechanism 182. Defective nozzles arehoused in that prescribed nozzle pallet 152. Next, nozzle pallet 152housed in the pallet carrier 180 is moved to the nozzle transferposition by the operation of first pallet moving mechanism 218. Then,defective nozzles loaded on nozzle pallet 152 are put into discard box222 by nozzle transfer device 134. Note that, work of discardingdefective nozzles loaded on nozzle pallet 152 to discard box 222 issimilar to work of loading suction nozzles 62 loaded on nozzle tray 88to nozzle pallet 152. Defective nozzles are put into discard box 222such that damage is avoided as far as possible.

In detail, within the defective nozzles, there are nozzles which can berestored by repair work or the like. Thus, if defective nozzles are putinto discard box 222 in a disorderly fashion, nozzles may collide witheach other, or suffer impact when being put into discard box 222, thuscausing the defective nozzles to become unable to be restored.Considering this problem, when putting defective nozzles into discardbox 222, the defective nozzle gripped by holding chuck 209 is releasedwhen above first inclined section 224 of discard box 222.

Specifically, when a defective nozzle that is to be discarded is held byholding chuck 209, transfer head 206, as shown in FIG. 16, is movedabove first inclined section of discard box 222 by operation of headmoving device 207. Then, at that position, the grip of holding chuck 209on the defective nozzle is released. That is, the defective nozzle isreleased above first inclined section 224. By this, the defectivenozzles falls on first inclined section 224. As described above, becausefirst inclined section 224 is an inclined surface, defective nozzlesthat land on first inclined section 224, fall down onto flat section225. Then, defective nozzles stop on flat section 225. Also, even if adefective nozzle rolls hard down first inclined section 224 and crossesflat surface 225, the defective nozzle rolls to second inclined section226, and is returned to flat section 225. In this manner, defectivenozzles put into discard box 222 stop on flat surface 225.

Thus, even in a case in which defective nozzles are put into discard box222 consecutively, because the defective nozzles are released abovefirst inclined section 224, fallen defective nozzles are prevented fromstrongly colliding with defective nozzles inside discard box 222. Bythis, it is possible to suitably prevent damage to nozzles caused bynozzles colliding with each other. Also, because first inclined section224, flat section 225, and second inclined section 226 are formed from acushion material, the impact when a defective nozzle falls, rolls downfrom first inclined section 224, and so on, is relatively small, and itis possible to suitably prevent damage to suction nozzles.

Note that, in the above embodiment, suction nozzle 62 is an example of asuction nozzle. Body pipe 64 is an example of a nozzle main bodysection. Flange 66 is an example of a flange section. Nozzle tray 88 isan example of a loading stage. Nozzle cleaning device 140 is an exampleof a nozzle cleaning device. Nozzle pallet 152 is an example of a nozzlesupport tool. Base plate 154 is an example of a support plate. Coverplate 156 is an example of a cover plate. Head moving device 207 is anexample of a moving device. Holding chuck 209 is an example of a holdingtool. Blow device 227 is an example of a nozzle drying device. Main bodysection 228 is an example of a main body section. Air ejection hole 229is an example of an air ejection hole. Housing 300 is an example of acleaning box. Spray nozzle 312 is an example of a water jettingapparatus. Spray nozzle moving mechanism 314 is an example of a waterjetting apparatus moving device. Ventilation pipe 320 is an example ofan air jetting apparatus. Drainage path 340 is an example off a drainagepath. Filter 342 is an example of a filter device. Booster pump 344 isan example of a pump. Separating plate 348 is an example of a separatingplate. Socket 370 is an example of a jetting direction changingmechanism and a protruding section. Second internal surface 374 is anexample of a tapered surface. Drainage path 376 is an example of adrainage path.

Further, the present disclosure is not limited to the above exampleembodiments, and various changed or improved methods of embodiment arepossible based on the knowledge of someone skilled in the art.Specifically, for example, in the above embodiment, the spray directionof the high pressure water sprayed from spray nozzles 312 is changed bysecond internal surface 374 of socket 370; however, the spray directionof the high pressure water may be changed by changing the arrangementangle of the spray nozzles 312 themselves. Also, as water used forcleaning suction nozzles 62, it is possible to use a dual flow thatmixes water and compressed air such as a mist.

Also, in the embodiment above, the tapered surface that changes thespray direction of the high pressure water, that is second internalsurface 374, is formed on tubular main body section 228 that surroundssuction tube 68; however, the tapered surface may be formed as a wall orthe like extending around the side of suction tube 68.

Also, in the above embodiment, suction nozzle 62 is cleaned with flange66 sandwiched between base plate 154 and cover plate 156; however, it ispossible to clean suction nozzle 62 loaded on a loading plate or thelike without sandwiching flange 66.

Also, in the above embodiment, suction nozzle 62 is cleaned afterinspection of suction nozzle 62, but it is possible to performinspection of suction nozzle 62 after cleaning of suction nozzle 62. Bythis, it is possible to inspect suction nozzles after cleaning, andsuction nozzles 62 can be inspected in a suitable state.

Various embodiments of the present disclosure are described below.

(0) A nozzle cleaning device comprising: a nozzle support tool thatfixedly supports a suction nozzle in a cleaning box such that a tip ofthe suction nozzle is exposed; and a water jetting apparatus that jetswater at the the tip of the suction nozzle supported by the nozzlesupport tool so as to clean the suction nozzle.

The embodiment of this clause provides the basic configuration of thepresent disclosure.

(1) The nozzle cleaning device according to clause (0), wherein thewater jetting apparatus jets water towards the tip section of thesuction nozzle, and the nozzle cleaning device is provided with ajetting direction changing mechanism that changes the jetting directionof the water jetted from the water jetting apparatus.

According to this embodiment, it is possible to jet cleaning water atthe tip section of a suction nozzle at various angles, so as toappropriately clean the tip section of the suction nozzle.

(2) The nozzle cleaning device according to clause (1) wherein, thejetting direction changing mechanism includes a protruding section thatprotrudes towards the tip of the suction nozzle supported by the nozzlesupport tool, the protruding section includes a tapered surface formedat a location positioned towards the tip of the suction nozzle, and theprotruding section changes the jetting direction of the water jettedfrom the water jetting apparatus by the water jetted from the waterjetting apparatus contacting the tapered surface.

According to this embodiment, the jetting direction of cleaning watercan be changed by a mechanism with a simple configuration.

(3) The nozzle cleaning device according to clause (2), wherein theprotruding section is a tube arranged so as to surround the tip of thesuction nozzle.

According to this embodiment, cleaning water can be jetted across theentire surface of the suction nozzle.

(4) The nozzle cleaning device according to clause (2) or (3), whereinthe protruding section includes a drainage path formed at a locationadjacent to a portion of the suction nozzle not extending beyond the tipof the suction nozzle.

According to this embodiment, cleaning water jetted inside theprotruding section can be drained outside the protruding section.

(5) The nozzle cleaning device according to any one of the clauses (1)to (4), wherein the water jetting apparatus jets a curtain of water, andthe nozzle cleaning device further comprises: a water jetting apparatusmoving device that moves the water jetting apparatus in a directionperpendicular to the axis line of the suction nozzle supported by thenozzle support tool.

According to this embodiment, high pressure water can be jetted acrossthe entire tip section of the suction nozzle.

(6) The nozzle cleaning device according to any one of the clauses (0)to (5), wherein a bottom section of the cleaning box functions as awater storage tank for storing water jetted from the water jettingapparatus.

According to this embodiment, because there is no need to provide awater storage tank outside the cleaning box, the configuration is simpleand costs are reduced.

(7) The nozzle cleaning device according to clause (6), furthercomprising a water drainage path that extends down and towards anopening at a lower section of the water storage tank, and a filterdevice provided on the water drainage path that removes impurities fromwater flowing through the water drainage path.

According to this embodiment, when filtering cleaning water collected inthe water storage tank, cleaning water can be filtered due to the weightof the cleaning water, and it is not necessary to provide a pump or thelike to supply the cleaning water in the filter device.

(8) The nozzle cleaning device according to clause (7), furthercomprising an expulsion pump that expels water from which impuritieshave been removed by the filter device towards the water jettingapparatus.

According to this embodiment, it is possible to reuse cleaning waterafter cleaning, which is economical.

(9) The nozzle cleaning device according to any one of clauses (6) to(8), further comprising an air jetting apparatus that jets air to thesuction nozzle cleaned by the nozzle cleaning device, and a separatingplate provided between the bottom section of the cleaning box thatfunctions as the water storage tank and the nozzle support tool.

According to this embodiment, when drying the suction nozzle by jettingair, it is possible to prevent cleaning water collected in the bottomsection of the cleaning box being blown up.

(10) The nozzle cleaning device according to clause (9), wherein theseparating plate is provided in an inclined state.

According to this embodiment, cleaning water that falls onto theseparating plate efficiently flows in the cleaning box.

(11) The nozzle cleaning device according to clause (9) or (10), whereinthe upper surface of the separating plate is formed from cushionmaterial.

According to this embodiment, it is possible to prevent cleaning waterthat falls on the separating plate from bouncing up to the suctionnozzle.

(12) A nozzle drying method comprising: a step of cleaning the suctionnozzle supported by the nozzle support nozzle using the nozzle cleaningdevice according to any one of the clauses (0) to (11), followed by adrying step of drying the suction nozzle, the drying step including aholding step of holding the suction nozzle supported by the nozzlesupport tool using a holding tool, a moving step of moving the suctionnozzle held by the holding tool to a nozzle drying device using a movingdevice, and a first drying step of drying the suction nozzle held by theholding device using the nozzle drying device.

According to this embodiment, it is possible to reliably remove wateradhered to the suction nozzle.

(13) The nozzle drying method according to clause (12), wherein thenozzle holding tool includes a support plate that supports from below aflange section of the suction nozzle configured from a tubular nozzlemain body section and the flange section that extends from an outercircumference of the nozzle main body section, a cover plate that, withthe support plate, sandwiches the flange section of the suction nozzlesupported by the support plate, and a relative movement mechanism thatrelatively moves the support plate and the cover plate, wherein theflange section of the suction nozzle supported by the support plate isswitchable to and from a state sandwiched between the support plate andthe cover plate and a state not sandwiched between the support plate andthe cover plate, by the support plate and the cover plate beingrelatively moved, and wherein, in the drying step, the suction nozzle ofwhich the flange section is sandwiched by the support plate and thecover plate is cleaned by the nozzle cleaning device and then dried, andwherein, in the holding step, the suction nozzle of which the flangesection is not sandwiched by the support plate and the cover plate isheld by the holding tool.

According to this embodiment, if water that gets between the supportplate and the cover plate adheres to the flange of the suction nozzle,the water can be suitably removed from the flange.

(14) The nozzle drying method according to clause (12) or (13), furthercomprising a second drying step wherein, before the suction nozzle isheld by the holding tool in the holding step, the suction nozzlesupported by the nozzle support tool is dried together with the nozzlesupport tool.

According to this embodiment, it is possible to dry the nozzle supporttool along with the suction nozzle, and move the nozzle support toolthat supports the suction nozzle in a dried state.

(15) The nozzle drying method according to any one of the clauses (12)to (14), further comprising a moving step of moving the holding toolholding the suction nozzle for which the first drying step has beencompleted to a loading stage on which the suction nozzle is to beloaded, using the moving device.

According to this embodiment, it is possible to store reliably driedsuction nozzles on the loading stage.

(16) The nozzle drying method according to any one of the clauses (12)to (15), wherein the nozzle drying device includes a main body sectionthat surrounds the suction nozzle, and an air ejection hole, opentowards an internal section of the main body section, for ejecting air,and wherein, in the moving step, the suction nozzle held by the holdingtool is moved to the internal section of the main body section by themoving device, and wherein, in the first drying step, the suction nozzleheld by the holding tool is dried by air ejected from the air ejectionhole.

According to this embodiment, it is possible to dry the suction nozzlewith a nozzle drying device with a simple configuration.

(17) The nozzle drying method according to clause (16), wherein theholding tool includes a rotating mechanism for rotating the held suctionnozzle about its own axis, the nozzle drying device includes at leastone of the air ejection holes arranged at a regular interval, andwherein, in the first drying step, the suction nozzle held by theholding device is dried by the air ejected from the at least one airejection hole in a state rotated by the rotating mechanism.

According to this embodiment, it is possible to dry the suction nozzleacross its entire surface using a nozzle drying device with few airejection holes, and the nozzle cleaning device has a simpleconstruction.

(18) The nozzle drying method according to clause (16) or (17), wherein,in the moving step, the suction nozzle held by the holding tool is movedinside the main body section by the moving device such that the flangeof the suction nozzle is positioned to the side of the air ejectionhole.

According to this embodiment, it is possible to reliably remove waterfrom the flange.

REFERENCE SIGNS LIST

62: suction nozzle; 64: body pipe (nozzle main body section); 66:flange; 88: nozzle tray (loading stage); 140: nozzle cleaning device;152: nozzle pallet (nozzle support tool); 154: base plate (supportplate); 156: cover plate; 207: head moving device (moving device); 209:holding chuck (holding tool); 227: blow device (nozzle drying device);228: main body section; 229: air ejection hole; 300: housing (cleaningbox); 312: spray nozzle (water jetting apparatus); 314: spray nozzlemoving device (water jetting apparatus moving device); 320: ventilationpipe (air jetting apparatus); 340: drainage path; 342: filter (filterdevice); 344: booster pump (pump); 348: separating plate; 370: socket(jetting direction changing mechanism) (protruding section); 374: secondinternal surface (tapered surface); 376: drainage path

The invention claimed is:
 1. A nozzle cleaning device comprising: anozzle support tool that fixedly supports suction nozzles along atwo-dimensional plane in a cleaning box such that a tip of each of thesuction nozzles is exposed; a water jetting apparatus that jets water atthe tips of the suction nozzles supported by the nozzle support tool soas to clean the suction nozzles; and a jetting direction changingmechanism that changes a jetting relative direction of the water jettedfrom the water jetting apparatus to the nozzle support tool along thetwo-dimensional plane, wherein the tips of the suction nozzles facetoward the water jetting apparatus, wherein the nozzle support toolincludes a base plate, and a cover plate which is slidably provided onthe base plate, and wherein the jetting direction changing mechanism isfixed to a lower surface of the base plate.
 2. The nozzle cleaningdevice according to claim 1, wherein the jetting directing changingmechanism includes a through-hole, in which an internal surface of thethrough-hole includes a first internal surface which is constant in avertical direction and which is positioned at a lower side of theinternal surface of the through-hole, and a second internal surfacewhich is tapered such that an internal diameter is smaller at a top endof the second internal surface than at a bottom end of the secondinternal surface, and the jetting direction changing mechanism changesthe jetting relative direction of the water jetted from the waterjetting apparatus by the water jetted from the water jetting apparatuscontacting the second internal surface of the through-hole.
 3. Thenozzle cleaning device according to claim 2, wherein the jettingdirection changing mechanism is a tube arranged so as to surround thesurface of the suction nozzle.
 4. The nozzle cleaning device accordingto claim 2, wherein the jetting direction changing mechanism includes adrainage path formed at a location adjacent to a portion of the suctionnozzles not extending beyond the tips of the suction nozzles.
 5. Thenozzle cleaning device according to claim 1, wherein the water jettingapparatus jets a curtain of water, and the nozzle cleaning devicefurther comprises a water jetting apparatus moving device that moves thewater jetting apparatus in a direction perpendicular to an axis line ofthe suction nozzles supported by the nozzle support tool.
 6. The nozzlecleaning device according to claim 1, wherein a bottom section of thecleaning box functions as a water storage tank for storing water jettedfrom the water jetting apparatus.
 7. The nozzle cleaning deviceaccording to claim 6, further comprising: a water drainage path thatextends down and towards an opening at a lower section of the waterstorage tank, a filter device provided on the water drainage path thatremoves impurities from water flowing through the water drainage path,and an expulsion pump that expels water from which impurities have beenremoved by the filter device towards the water jetting apparatus.
 8. Thenozzle cleaning device according to claim 6, further comprising: an airjetting apparatus that jets air to the suction nozzle cleaned by thenozzle cleaning device, and a separating plate provided between thebottom section of the cleaning box that functions as the water storagetank and the nozzle support tool.